Novel Water Probe for High-Frequency Focused Transducer Applied to Scanning Acoustic Microscopy System: Simulation and Experimental Investigation

摘要

A scanning acoustic microscopy (SAM) system is a common non-destructive instrument which is used to evaluate the material quality in scientific and industrial applications. Technically, the tested sample is immersed in water during the scanning process. Therefore, a robot arm is incorporated into the SAM system to transfer the sample for in-line inspection, which makes the system complex and increases time consumption. The main aim of this study is to develop a novel water probe for the SAM system, that is, a waterstream. During the scanning process, water was supplied using a waterstream instead of immersing the sample in the water, which leads to a simple design of an automotive SAM system and a reduction in time consumption. In addition, using a waterstream in the SAM system can avoid contamination of the sample due to immersion in water for long-time scanning. Waterstream was designed based on the measured focal length calculation of the transducer and simulated to investigate the internal flow characteristics. To validate the simulation results, the waterstream was prototyped and applied to the TSAM-400 and W-FSAM traditional and fast SAM systems to successfully image some samples such as carbon fiber-reinforced polymers, a printed circuit board, and a 6-inch wafer. These results demonstrate the design method of the water probe applied to the SAM system.