Tapered-Based Novel Thermal Compensation Techniques for Enhanced Performance of MEMS-Based Gyroscope

摘要

Understanding and mitigating the impact of temperature on MEMS-based gyroscope performance is crucial for their reliable use in various applications including defence, navigation, robotics, and aerospace systems. This paper analyses the effect of the temperature change and proposes a new compensation idea for the temperature-induced change at the structure design level. As the temperature varies from low to high temperatures, the drive and sense frequency mismatch is observed. It is important to minimize the frequency mismatch because it has a strong influence on bandwidth and sensitivity. The design innovations of the beam structure of sense mass are used to control the frequency mismatch and the deformation due to temperature variation. It is proposed that using a tapered beam for the sense deflection, the frequency mismatch is reduced in the full temperature range, and mechanical sensitivity variation is also reduced. The new design innovation holds promise for future applications requiring more temperature-tolerant MEMS gyroscope sensors.