Design and study of the mask exchange system based on Delta parallel mechanism

摘要

Mask exchange system is the main part of Multi-Object Broadband Imaging Echellette (MOBIE) on the Thirty Meter Telescope (TMT). The robot is one of the key parts in the mask exchange process. In view of the facts that the scheme the on-board robot is hard to meet the requirements of TMT and the traditional industrial robot is difficult to use in the Mask Exchange System (MEX). The delta parallel mechanism has much advantages such as good dynamic performance, high speed and could integrate a vision recognition system to identify the masks. The design for MEX based on off-board Delta parallel mechanism was proposed in the paper.