Microelectromechanical systems (MEMS): Applications for NDE?

摘要

In the past 15 years, micro-electro-mechanical systems (MEMS) have become a topic of widespread research, development and commercialization. Made by augmented integrated circuit fabrication techniques and having at least one dimension in the micron range, these devices have been used in computer printers and in vehicles for airbag deployment, and they are expected to provide the basis for many new types of biomedical, analytic, optical and communications equipment. We will describe some possible MEMS applications to NDE, including the use of MEMS ultrasonic transducers, optical components, and communicating micro-robots that could be used to monitor the integrity of structures. “Exploration about the edges of things … encourages the growth of new idea and new perceptions.”