Nanorobot-Based Handling and Transfer of Individual Silicon Nanowires

摘要

Presented is a new experimental implementation for well-directed handling of silicon nanowires with diameters of less than 100 nm and length of up to 10 µm. Handling device is a robotic setup of several centimeters in size and nanometer accuracy, mounted inside a SEM (Scanning Electron Microscopy) chamber. The actual transfer of the nanowires is done by this setup from a production substrate to a different electrode substrate by using an STM (Scanning Tunneling Microscope) tungsten tip as carrier, gas based adhesive bonding, and FIB (Focused Ion Beam) assisted milling. The goal of this series is the placement on the electrodes in order to facilitate further electrical characterization measurements. The presented handling technique for nanoscale objects facilities an accurate picking and placing of individual nanowires on the one hand and a transfer over several centimeters to a complete different substrate on the other hand. Advantages, prospects and limits are investigated particularly with regard to a handling automation for applications.