Individual nanowire handling for NEMS fabrication

摘要

This paper presents the development of a novel technique for well directed handling of nanowires made of different materials with diameters down to 100nm or less and length up to several ten μms. The presented transfer technique uses an adhesive bond handling approach and is able to bridge any distance between the nanowire's source and target. The operational range is only limited by the robotic setup, which is mounted inside a high-resolution scanning electron microscope. Additionally, focused ion beam and gas injection systems are used. This transfer approach is a seminal technique towards an assembly of nanowire based devices.