Proximity sensing of electrostatic induction electret nanoparticles device using separation electrode

摘要

We reported a two dimensional self-powered proximity sensor based on nanoparticles polytetrafluoroethylene (PTFE) electrostatic induction electret using separation electrode. The structural pattern was carefully designed for identifying the specific position on the horizontal plane. When the separation electrode is motioned above the sensor, the induced charges on electrodes will change based on the coupling effect of the electret film. Experiment results showed that the proximity sensor works well with the velocity 0.05 m/s. We also found that the prototype have a good stability even with a huge uncontrolled perturbation on the Y direction. Our work could be a significant step forward in self-powered proximity sensing technology, with a wide range of potential applications in touchpad, robotics, and safety-monitoring device.