OTHER
Micro robot system with moving micro-car driven by electrostatic comb-drive actuators
Phuc Hong Pham, Lam Bao Dang, Hung N. Vu
- 发表年份
- 2010
- 引用次数
- 10
关键词
Comb driveRatchetMicroelectromechanical systemsWaferActuatorRobotMaterials scienceSilicon on insulatorPerpendicularAcoustics
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