A Large Aperture 2-Axis Electrothermal MEMS Mirror for Compact 3D LiDAR

摘要

Low-cost LiDAR with long distance, high resolution, and stable laser scanning are needed for robotics and automobiles. This paper reports a large-aperture, 2-axis electrothermal MEMS mirror for LiDAR applications. The MEMS mirror has a mirror plate of 2 × 2.5 mm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> and an optical field view (FoV) of 15° by 12°. The beam divergence of 0.5 mrad is achieved with a 1.3-mm laser beam. The rotational scanning resonant mode is at 0.7 kHz, which is achieved by the meshed bimorph actuators with improved stiffness.