Design and Performance Evaluation of a Single-Phase Driven Ultrasonic Motor Using Bending-Bending Vibrations

摘要

An ultrasonic motor as a kind of smart material drive actuator has potential in robots, aerocraft, medical operations, etc. The size of the ultrasonic motor and complex circuit limits the further application of ultrasonic motors. In this paper, a single-phase driven ultrasonic motor using Bending-Bending vibrations is proposed, which has advantages in structure miniaturization and circuit simplification. Hybrid bending vibration modes were used, which were excited by only single-phase voltage. The working principle based on an oblique line trajectory is illustrated. The working bending vibration modes and resonance frequencies of the bending vibration modes were calculated by the finite element method to verify the feasibility of the proposed ultrasonic motor. Additionally, the output performance was evaluated by experiment. This paper provides a single-phase driven ultrasonic motor using Bending-Bending vibrations, which has advantages in structure miniaturization and circuit simplification.