Friction based locomotion module for mobile MEMS robots

摘要

The "modulated friction inertial drive (MFID) principle" is presented as a locomotion solution for mm- size micro robots dealing with both size constraints and limitations in terms of power consumption. Based on one of the configurations of this locomotion principle a locomotion module (10 times 10 mm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> ) with two degrees of freedom (X, thetas <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">z</sub> ) has been developed. It consists of two horizontally vibrating masses actuated by electrostatic comb drives and fabricated by DRIE on a SOI wafer. The design as well as calculated and measured actuator displacements and resonance frequencies are presented. First locomotion experiments have shown a linear velocity of 0.207 mm/s for a driving voltage of 30 V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">p2p</sub> and a power consumption of only 16.6 muW.