Compact scanning confocal chromatic sensor enabling precision 3-D measurements

摘要

This paper proposes a compact and lightweight scanning confocal chromatic sensor (SCCS) for robot-based precision three-dimensional (3-D) surface measurement applications. The integrated system design includes a 2-D fast steering mirror (FSM) to manipulate the optical path of a high precision 1-D confocal chromatic sensor (CCS). A data-driven calibration procedure is used to accurately combine the FSM deflection angles and the correspondingly measured distances to the sample surface in order to obtain a correctly reconstructed 3-D image. Lissajous scan trajectories are applied to enable efficient scans of the sample surface. The SCCS provides 3-D images at frame rates of up to 1 fps and a measurement volume of <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"> <mml:mn>0.35</mml:mn> <mml:mo>×</mml:mo> <mml:mn>0.25</mml:mn> <mml:mo>×</mml:mo> <mml:mn>1.8</mml:mn> <mml:mspace width="thickmathspace"/> <mml:mrow class="MJX-TeXAtom-ORD"> <mml:msup> <mml:mrow class="MJX-TeXAtom-ORD"> <mml:mi mathvariant="normal">m</mml:mi> <mml:mi mathvariant="normal">m</mml:mi> </mml:mrow> <mml:mn>3</mml:mn> </mml:msup> </mml:mrow> </mml:math> , as well as the measurement of arbitrary regions of interest. Using a calibration standard including structures with defined sizes, the lateral and axial resolutions are determined to 2.5 µm and 76 nm, respectively.