A high-resolution flexible sensor array based on PZT nanofibers

摘要

Flexible tactile sensor array has drawn great attention due to its ability to mimic human skin for sensing weak pressure and distinguishing pressure distribution, but the deficiency of sensitivity, the low resolution, and the complex and costly fabrication process seriously limit its development. Hence, it is urgent to explore a fully flexible sensor array with high sensitivity and high resolution as an electronic-skin. Here, the flexible piezoelectric tactile sensor array based on the composite film of PZT nanowires and polydimethylsiloxane (PDMS) was fabricated by the simple fabrication process (electrospinning process and mixture process). The electrospun PZT nanofibers have high aspect ratio and could enhance the generation and accumulation of the piezoelectric charges in the two electrodes of the composite film. By virtue of the inherently high piezoelectric coefficient of PZT material and high aspect ratio of PZT nanofibers, the composite film (75 wt% PZT nanofibers) presents high force-electric conversion capability and high sensitivity. Owing to the bottom electrode sheet shared by all sensor units and the supporting layer with relatively high elastic modulus, the sensor array shows high resolution to qualitatively sense the distribution and size of the impact in real time. Moreover, the sensor array also shows great durability, repeatability, and large working range. Based on these excellent characteristics, the sensor array has wide potential applications in the field of bionics science, robotics science and human-machine interaction.