<scp>PZT</scp> ‐Based Piezoelectric <scp>MEMS</scp> Technology

摘要

This review article presents recent advancements in the design and fabrication of thin‐film (&lt;3 μm) lead zirconate titanate ( PZT ) microelectromechanical system ( MEMS ) devices. The article covers techniques for optimizing highly (001)/(100) oriented chemical solution deposited PZT films to achieve improved piezoelectric coefficients. These PZT films combined with surface and bulk micromachining techniques are fabricated into actuators and transducers for radio frequency ( RF ) switches, nanomechanical logic, resonators, and power transformers for use in communication systems and phased‐array radar. In addition, the large relative displacements generated by PZT thin films have been used to demonstrate mechanical mobility in MEMS devices, including insect‐inspired flight actuators and ultrasonic traveling wave motors. In conjunction with actuation, PZT films are being developed for feedback sensors for the integrated control of insect‐inspired robots.