Tingting Leng
Papers
1
Total Citations
32
H-Index
1
About
Dr. Tingting Leng is a leading researcher in semiconductor manufacturing automation, specializing in the scheduling and control of cluster tools—critical equipment in wafer fabrication. Her work addresses the complex challenge of optimizing cyclic scheduling for dual-arm cluster tools under wafer residency time constraints, a problem that directly impacts production efficiency and yield in advanced chipmaking. In her highly cited 2023 paper, Dr. Leng introduced a novel approach that configures processing modules and robot waiting times to achieve optimal schedules, moving beyond traditional assumptions that all identical modules must process the same wafer type. This contribution has garnered 32 citations, reflecting its significance in both academia and industry. By tackling unresolved scheduling bottlenecks, her research enables more flexible and efficient tool operations, reducing cycle times and improving throughput. Dr. Leng’s work is essential reading for researchers and engineers in semiconductor manufacturing, operations research, and automation, offering practical solutions to real-world fabrication challenges. Her ongoing contributions continue to shape the future of smart manufacturing and cyber-physical production systems.
Research Focus
Key Achievements
Top Papers
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