Wafer
相关论文数: 20
顶级研究者
最高引用论文
Waterproof AlInGaP optoelectronics on stretchable substrates with applications in biomedicine and robotics
Rak-Hwan Kim, Dae‐Hyeong Kim, Jianliang Xiao, Bong Hoon Kim, Sang-Il Park, Bruce Panilaitis, Roozbeh Ghaffari, Jimin Yao, Ming Li, Zhuangjian Liu, Viktor Malyarchuk, Dae Gon Kim, An‐Phong Le, Ralph G. Nuzzo, David L. Kaplan, Fiorenzo G. Omenetto, Yonggang Huang, Zhan Kang, John A. Rogers
引用数: 639 • 2010
Electronically integrated, mass-manufactured, microscopic robots
Marc Z. Miskin, Alejandro J. Cortese, Kyle Dorsey, Edward Esposito, Michael Reynolds, Qingkun Liu, Michael C. Cao, David A. Muller, Paul L. McEuen, Itai Cohen
引用数: 344 • 2020
Scheduling analysis of time-constrained dual-armed cluster tools
Ja-Hee Kim, Tae‐Eog Lee, Hwan-Yong Lee, D.-J. Park
引用数: 275 • 2003
A Petri Net Method for Schedulability and Scheduling Problems in Single-Arm Cluster Tools With Wafer Residency Time Constraints
Naiqi Wu, Chengbin Chu, Feng Chu, Meng Zhou
引用数: 230 • 2008
Piezoelectric micromotors for microrobots
Anita M. Flynn, Lee S. Tavrow, Stephen F. Bart, Rodney A. Brooks, D. J. Ehrlich, Krishna Udayakumar, L. E. Cross
引用数: 229 • 1992
A fast flexible ink-jet printing method for patterning dissociated neurons in culture
Neville E. Sanjana, Sawyer B. Fuller
引用数: 226 • 2004
Modeling, Analysis and Control of Dual-Arm Cluster Tools With Residency Time Constraint and Activity Time Variation Based on Petri Nets
Nai Qi Wu, MengChu Zhou
引用数: 209 • 2012
Sensitive Electronic-Skin Strain Sensor Array Based on the Patterned Two-Dimensional α-In<sub>2</sub>Se<sub>3</sub>
Wei Feng, Wei Zheng, Feng Gao, Guangbo Liu, Tawfique Hasan, Wenwu Cao, PingAn Hu
引用数: 189 • 2016
Timed Petri nets in modeling and analysis of cluster tools
W.M. Zuberek
引用数: 182 • 2001
Achromatic super-oscillatory lenses with sub-wavelength focusing
Guang Yuan, Edward T. F. Rogers, Nikolay I. Zheludev
引用数: 168 • 2017
An Extended Event Graph With Negative Places and Tokens for Time Window Constraints
Tae‐Eog Lee, Sanghoo Park
引用数: 150 • 2005
Petri Net-Based Scheduling of Single-Arm Cluster Tools With Reentrant Atomic Layer Deposition Processes
Naiqi Wu, Feng Chu, Chengbin Chu, MengChu Zhou
引用数: 148 • 2010
Scheduling Single-Armed Cluster Tools With Reentrant Wafer Flows
Hyunjae Lee, Tae‐Eog Lee
引用数: 131 • 2006
A review of scheduling theory and methods for semiconductor manufacturing cluster tools
Tae‐Eog Lee
引用数: 123 • 2008
Scheduling Cluster Tools in Semiconductor Manufacturing: Recent Advances and Challenges
Chunrong Pan, MengChu Zhou, Yan Qiao, Naiqi Wu
引用数: 123 • 2017
Petri Net Modeling and Scheduling of a Close-Down Process for Time-Constrained Single-Arm Cluster Tools
QingHua Zhu, MengChu Zhou, Yan Qiao, Naiqi Wu
引用数: 112 • 2016
Scheduling Cluster Tools With Ready Time Constraints for Consecutive Small Lots
Hyun-Jung Kim, Jun-Ho Lee, Chihyun Jung, Tae‐Eog Lee
引用数: 109 • 2012
Novel automated process for aspheric surfaces
R. Bingham, David Walker, Do Hyung Kim, David Brooks, R. R. Freeman, Darren L. Riley
引用数: 108 • 2000
Noncyclic Scheduling of Cluster Tools With a Branch and Bound Algorithm
Hyun-Jung Kim, Jun-Ho Lee, Tae‐Eog Lee
引用数: 100 • 2014
A Supervisory Wafer-Level 3D Microassembly System for Hybrid MEMS Fabrication
Yang Ge, J. A. Gaines, Bradley J. Nelson
引用数: 98 • 2003