Tactile MEMS-based sensor for delicate microsurgery

摘要

This paper presents development of a new MEMS-based tactile microsensor to replicate the delicate sense of touch in robotic surgery. Using an epoxy-based photoresist, SU-8, as substrate, the piezoresistive type sensor is flexible, robust, and easy to fabricate in mass. Sensor characteristic tests indicate adequate sensitivity and linearity, and the multiple sensor elements can match full range of surgical tissue stiffness. Such characteristic nearly match the most delicate sense of touch at the human fingertip. It is expected such a sensor is essential for delicate surgeries, such as handling delicate tissues and microsurgery.