MEMS technology and applications

摘要

Summary form only given. This talk will primarily discuss several representative systems applications of microelectromechanical systems (MEMS) for smart physical sensing, minimally invasive surgery, robotics, and bioanalytic medicine. This talk will describe MEMS materials, processing technologies, and device applications including i) physical microsensors for detecting force, pressure, and acoustic energy, 2) microvalves, micropumps, and capillaries for microfluidic controls; 3) biosensors based on molecular recognition structures; 4) miniature linear micromotors for precision positioning and manipulation of cells; and 5) surgical and scientific microinstruments. Selected successful systems demonstration applications from the fields of ophthalmology, arthroscopic surgery, gynecology, and laboratory medicine will be presented. Design issues, technology limitations, systems integration approaches, and future opportunities of MEMS will be discussed.