A FEM simulation approach for multilayered SAW delay line devices

摘要

The active compliance control is popular in surgical robots, which requires novel wireless and passive pressure sensor. In this paper, a simulation of surface acoustic wave multilayered device is presented. It includes a SiO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> / Al electrode/ YZ-LiTaO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> , which has a high coupling coefficient as well as a low temperature coefficient of delay. An eigenfrequency analysis is done first to calculate the phase velocity and input frequency of the RF signal. A time domain analysis is pursued next to generate the surface acoustic waves and the characteristics of wave propagation. In this process, the boundary reflection is eliminated by adding perfectly matched layers and appropriate damping. This approach is essential for assessment of SAW pressure sensor design configurations prior to prototyping.