Modeling and simulation study of acoustic response for dual-membrane capacitive MEMS microphone

摘要

Abstract As the micro-electro-mechanical systems (MEMS) technology matures, MEMS sensors have found widespread applications in mechatronics, robotics, and voice control. The high stability, high integration, and radio frequency interference resistance of MEMS microphones have rapidly led to their adoption in these domains, displacing electret condenser microphones.This article focuses on modeling and analyzing dual-membrane capacitive MEMS microphone, utilizing an lumped equivalent circuit model to calculate the microphone’s acoustic frequency response. Furthermore, the article employs the finite element method (FEM) to conduct a detailed analysis of the resonant frequency of the membrane, as well as to explore the effects of changes in the volume of the front and back chamber on the packaging performance of MEMS microphones. Finally, physical tests were conducted, and the simulation results of the two models showed considerable consistency with the curves obtained from the physical tests, verifying the accuracy of the models.