Robust Cu atom switch with over-400°C thermally tolerant polymer-solid electrolyte (TT-PSE) for nonvolatile programmable logic

摘要

A fully 400°C-processed, standard Cu-BEOL compatible, robust Cu atom switch has been developed featuring an over-400°C high thermally tolerant polymer-solid electrolyte (TT-PSE). Hydrocarbons that have weak chemical bindings in the PSE are selectively eliminated in the TT-PSE, resulting in higher thermal stability. The TT-PSE also gives higher breakdown voltage (+1V) with keeping low set voltage (2V) due to the elimination of the fragile hydrocarbon bindings. Data retention characteristics after thermal cycle stress at temperature ranging from -65 to 150°C for 1000 cycles are confirmed for the first time. The developed atom switch is to be a technology enabler of reliable reprogrammable logics for future robotic/vehicle applications at high temperatures.