OTHER
Polydimethylsiloxane as polymeric protective coating for fabrication of ultra-thin chips
Shoubhik Gupta, Anastasios Vilouras, Ravinder Dahiya
- 发表年份
- 2019
- 引用次数
- 23
关键词
PolydimethylsiloxaneMaterials scienceWaferEtching (microfabrication)CoatingFabricationSiliconTetramethylammonium hydroxideIsotropic etchingNanotechnology
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