Nanolaminated Permalloy Core for High-Flux, High-Frequency Ultracompact Power Conversion

摘要

Metallic magnetic materials have desirable magnetic properties, including high permeability, and high saturation flux density, when compared with their ferrite counterparts. However, eddy-current losses preclude their use in many switching converter applications, due to the challenge of simultaneously achieving sufficiently thin laminations such that eddy currents are suppressed (e.g., 500 nm-1 μm for megahertz frequencies), while simultaneously achieving overall core thicknesses such that substantial power can be handled. A CMOS-compatible fabrication process based on robot-assisted sequential electrodeposition followed by selective chemical etching has been developed for the realization of a core of substantial overall thickness (tens to hundreds of micrometers) comprised of multiple, stacked permalloy (Ni <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">80</sub> Fe <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">20</sub> ) nanolaminations. Tests of toroidal inductors with nanolaminated cores showed negligible eddy-current loss relative to total core loss even at a peak flux density of 0.5 T in the megahertz frequency range. To illustrate the use of these cores, a buck power converter topology is implemented with switching frequencies of 1-2 MHz. Power conversion efficiency greater than 85% with peak operating flux density of 0.3-0.5 T in the core and converter output power level exceeding 5 W was achieved.