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A cost-effective flexible MEMS technique for temperature sensing

Suyan Xiao, Lufeng Che, Xinxin Li, Yuelin Wang

发表年份
2007
引用次数
47

关键词

PolyimideMicrosystemMaterials scienceMicroelectromechanical systemsFabricationWaferOptoelectronicsSubstrate (aquarium)Surface micromachiningElectronic engineering

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