On the coarse/fine dual-stage manipulators with robust perturbation compensator

摘要

A dual-stage, fast and fine robotic manipulator is presented. By adopting merits of both coarse and fine actuator, a desirable system having the capacity of large workspace with high resolution of motion is enabled. We constructed an ultra precision XY-manipulator with dual-stage structure where the PZT driven fine stage is mounted on the motor driven XY positioner and applied it to fine tracking controls and micro-teleoperations as a slave manipulator. We describe essential merits of the compound actuation mechanism and the control strategy to successfully utilize it with a proper servo system design. Through experimental results, the effectiveness of the coarse/fine manipulation by the dual stage manipulator is shown.