Sputter deposition

相关论文数: 15

最高引用论文

Optoelectronic artificial synapses based on β-Ga2O3 films by RF magnetron sputtering

Xinrong Chen, Wei Mi, Meng Li, Jinze Tang, Jinshi Zhao, Liwei Zhou, Xingcheng Zhang, Chongbiao Luan

引用数: 53 • 2021

Gold/Polyimide-Based Resistive Strain Sensors

Tao Han, Anindya Nag, Nasrin Afsarimanesh, Fowzia Akhter, Hangrui Liu, Samta Sapra, Subhas Chandra Mukhopadhyay, Yongzhao Xu

引用数: 47 • 2019

Combinatorial thin film composition mapping using three dimensional deposition profiles

Santosh K. Suram, Lan Zhou, Natalie Becerra-Stasiewicz, Kevin Kan, Ryan J. R. Jones, Brian M. Kendrick, John M. Gregoire

引用数: 38 • 2015

Shape memory NiTi thin films deposited on polyimide at low temperature

Venkata Girish Kotnur, F.D. Tichelaar, W.T. Fu, J. Th. M. De Hosson, G. C. A. M. Janssen

引用数: 33 • 2014

A new highly automated sputter equipment for <i>in situ</i> investigation of deposition processes with synchrotron radiation

Ralph Döhrmann, Stephan Botta, Adeline Buffet, Gonzalo Santoro, Kai Schlage, Matthias Schwartzkopf, Sebastian Bommel, Johannes F. H. Risch, Roman Mannweiler, Simon Brunner, Ezzeldin Metwalli, Peter Müller‐Buschbaum, Stephan V. Roth

引用数: 30 • 2013

Shape memory thin films formed with carrousel-type magnetron sputtering apparatus

Akira Ishida, Morio Sato, Osamu Tabata, W. Yoshikawa

引用数: 17 • 2005

Tomographic imagings of a plasma structure and sputtered particle in a direct current magnetron discharge

Akihiko Itoh, Toshiaki Makabe, N. Shimura, S. Tougo

引用数: 17 • 1996

Study on the characteristics of thermo-electrodes of various deposition parameters for the flexible temperature sensor

Zhaojun Liu, Bian Tian, Fan Xu, Zhongkai Zhang, Jiangjiang Liu, Qijing Lin, Peng Shi, Feng Han, Qi Mao, Zhuangde Jiang

引用数: 14 • 2020

Transparent Zinc Oxide Memristor Structures: Magnetron Sputtering of Thin Films, Resistive Switching Investigation, and Crossbar Array Fabrication

A. V. Saenko, R V Tominov, I L Jityaev, Zakhar Vakulov, V I Avilov, Nikita V. Polupanov, V. A. Smirnov

引用数: 11 • 2024

NiB-CrC Coatings Prepared by Magnetron Sputtering Using Composite Ceramic NiCr-BC Target Produced by Detonation Spray Coating

В. В. Сирота, Д. С. Прохоренков, M. V. Limarenko, A. A. Skiba, М. Г. Ковалева

引用数: 11 • 2022

Alleviation of honeycomb print-through of NiP/Cu coated carbon fiber composite mirror via robot-arm wheel polishing

Yong-jie Wang, Yongsheng Yao, Liang Xu, Xiaoge Wu, Le Shen, Guoyan Sun

引用数: 7 • 2022

Vibration Sensors on Flexible Substrates Based on Nanoparticle Films Grown by Physical Vapor Deposition

Evangelos Aslanidis, Savvas Sarigiannidis, Evangelos Skotadis, Dimitris Tsoukalas

引用数: 6 • 2024

Magnetron Sputtering Coating of Protective Fabric Study on Influence of Thermal Properties

Yunqi Zhai, Xiaoxia Liu, Xiao Li

引用数: 6 • 2015

Plasma sputtering robotic device for <i>in-situ</i> thick coatings of long, small diameter vacuum tubes

A. Hershcovitch, M. Blaskiewicz, J.M. Brennan, Art Custer, Aaron Dingus, Mark Erickson, W. Fischer, Nader Jamshidi, R. Laping, C.J. Liaw, W. Meng, H. J. Poole, R. Todd

引用数: 4 • 2015

Investigation of the Al-Mo-B(CN) Coatings Deposited Using Magnetron Sputtering of Al-Mo-B4C Target Produced by Detonation Spray Coating

S. V. Zaı̆tsev, В. В. Сирота, М. Г. Ковалева, Д. С. Прохоренков, A. A. Skiba, M. V. Limarenko

引用数: 1 • 2023