S.G. Lele
Papers
1
Total Citations
14
H-Index
1
About
No biography available yet.
Research Focus
Beam (structure)1 · 14 citations
Cathode ray1 · 14 citations
Deflection (physics)1 · 14 citations
Detector1 · 14 citations
Electron1 · 14 citations
Electron gun1 · 14 citations
Materials science1 · 14 citations
Optics1 · 14 citations
Optoelectronics1 · 14 citations
Physics1 · 14 citations
Secondary electrons1 · 14 citations
Wafer1 · 14 citations
Key Achievements
1
H-Index
1
Papers
14
Total Citations
14
Avg Citations/Paper
🏆 Most Cited Paper
An electron-beam inspection system for x-ray mask production
14 citations · 1991
📈 Most Prolific Year: 1991 (1 Papers)
🤝 Key Collaborators: 27
Top Papers
- 1An electron-beam inspection system for x-ray mask production14 citations · 1991
Key Collaborators
BBBob Becker1 shared papersMYM. Y. Ling1 shared papersDED. E. A. Smith1 shared papersJEJ. E. McMurtry1 shared papersLAL. A. Honfi1 shared papersLHLee H. Veneklasen1 shared papersZCZhile Chen1 shared papersDJD. J. Clark1 shared papersJKJ. K. H. Rough1 shared papersJDJ. D. Greene1 shared papersHDHans Dohse1 shared papersADAlan D. Brodie1 shared papersPSPaul Sandland1 shared papersCPC.-S. Pan1 shared papersAKAchyut K. Dutta1 shared papersJTJim Taylor1 shared papersAAAmi A. Desai1 shared papersRRR. R. Simmons1 shared papersWDW. D. Meisburger1 shared papersJJJack Jau1 shared papers
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