Shanghai Huali Microelectronics (China)

🇨🇳 CN

Papers

1

Total Citations

1

H-Index

1

Researchers

5

About

No biography available yet.

Research Focus

Key Achievements

1
H-Index
1
Papers
1
Total Citations
5
Faculty & Researchers
🏆 Most Cited Paper
Investigation and Reduction of Systematic Defects by Wafer Backside Process in Nanometer Semiconductor Manufacturing
1 citations · 2020
📊 Avg Citations/Paper: 1
📈 Most Prolific Year: 2020 (1)
🔬 Research Focus: Composite material, Etching (microfabrication), Layer (electronics), Lithography, Materials science, Nanometre

Top Papers

  1. 1

Faculty & Researchers

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